Novel design of electrostatic micro cantilever for enhanced travel range
نویسندگان
چکیده
منابع مشابه
Shape Optimization of Electrostatically Actuated Micro Cantilever Beam with Extended Travel Range Using Simulated Annealing
The pull-in instability places substantial restrictions on the performance of electrostatically driven MEMS devices by limiting their range of travel. Our objective is to present a systematic method of carrying out optimal design of novel types of electrostatic beams that have enhanced travel ranges. In this paper, we implement a shape optimization methodology using simulated annealing to maxim...
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ژورنال
عنوان ژورنال: Journal of Physics: Conference Series
سال: 2021
ISSN: 1742-6588,1742-6596
DOI: 10.1088/1742-6596/1921/1/012084